List of MEMS foundries

The list below provides a comprehensive overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication.

Company	Service	Substrate materials	Production volume	Wafer diameters (in inches)	Type	Headquartered country
Asia Pacific Microsystems, Inc.	MEMS Foundry	Silicon, Sapphire, SOI, Glass, Quartz, Polymer, CMOS-wafers	High volume production	6	Pure-play	Taiwan
Bosch	Customized MEMS process development and manufacturing. Optional: design, assembly, test, integration	Silicon, SOI, Fused silica or glass, post-processing on 200mm-CMOS wafers	Prototyping, development, medium and high volume	6, 8	IDM	Germany
CEA-LETI	Customized MEMS, NEMS, BioMEMS: design, process, manufacturing, characterization, and packaging	Silicon, SOI, glass, and CMOS-wafers.	R&D recurrent batches and pilot line	8, 12	Pure-play	France
Centre Suisse d'Electronique et de Microtechnique	MEMS design & process development, Lab-to-Fab approach. Focus areas include photonics, microfluidics, watch components, and harsh environments.	Silicon, SOI, fused silica, quartz, glass, and custom substrates	Prototyping, small & medium volume production	6	Pure-play	Switzerland
Hanking Electronics	Class 100 MEMS Foundry Services, MEMS IMUs (6 DoF accelerometers/ gyroscopes), IoT modules and MEMS Design Services. Foundry processes include; Film Deposition, Metal Deposition, Thermal, Wafer Bonding, Etch processes including DRIE and VHF, Wet Processes, and Wafer Level Packaging.	Silicon	High volume production	8	IDM	China
Honeywell	MEMS manufacturing and design	Silicon	High volume production	4, 6	IDM	United States
IMEC	Low-medium volume MEMS manufacturing (CMOS compatible), incl. custom design, development, post-processing and prototyping	Si, SOI, fused silica or glass; post-processing on CMOS wafers (8-inch to 12-inch )	Prototyping, low and medium volume production; transfer to foundry for high volume	8, 12	Pure-play	Belgium
Innovative Micro Technology	MEMS, biochip, and photonics manufacturing, including custom design, development, prototyping, and high volume production	Silicon, SOI, borosilicate, fused silica, quartz, glass, piezo, and engineered substrates	High volume production	6, 8	Pure-play	United States
iX-factory now Micronit GmbH since 03/2016	Customised MEMS design and manufacturing	Silicon and SOI, borosilicate glass or quartz, structured wafer	Prototyping and middle-sized batch production	6, 8	Pure-play	Germany
LioniX International	Customized MEMS design, custom process development, prototyping and production.	Silicon, SOI, fused silica, borosilicate glasses, thermally oxidized silicon.	Proof of concept, prototyping, pilot production, small and medium volumes.	4, 6	Pure-play	Netherlands
Nanoshift LLC	Contracted R&D and manufacturing with extensive experience in processing and integration. Specialize in MEMS, microfluidics, silicon photonics, TSV, CMOS integration, and other emerging technologies.	Silicon, SOI, Glass, flex substrates, polymer, and other materials.	Proof of concept, process development, prototyping, low to mid volume	2, 3, 4, and 6	IDM	United States
SCL	CMOS & MEMS design, manufacturing and packaging; microfabrication	Silicon, SOI and various glasses	From Low volume production	6,8	Pure-play	India
Mapper	MEMS process development and manufacturing	Silicon, SOI and various glasses, piezoelectric materials	Low volume and prototyping	4	Pure-play	Russia
Microfluidic Foundry	BioMEMS design and manufacturing	Silicon, Glass, SU8/PDMS, Polymer	R&D, Mini volume production		IDM	United States
NaugaNeedles, LLC.(NN)	MEMS foundry, MEMS manufacturing	Glass Wafers, Quartz Wafers, Silicon Wafers, Structured Wafers, SOI Wafers and bonding material.	High volume production	6	Pure-play	United States
nanoPHAB	Micro- and Nano-fabrication services, nano-MEMS manufacturing, ASIC	III-V materials, GaAs, InP, Si, Oxi-Nitrides, Glass, Polymers, Multimaterials	Epi-growth, Prototyping and Consultancy. Low to medium volume production. Bridge to high volume.	2, 3, 4	Pure-Play	Netherlands
NEMS and MEMS Proto Fab (NMPF)	MEMS manufacturing, microfabrication services	Silicon, Glass, Quartz, SOI wafers	Low to medium volume and prototyping	2, 4	Pure play	India
Philips Innovation Services	Customized MEMS and Micro Assembly, process design and manufacturing, certified for medical devices	Silicon, SOI, glass, quartz and CMOS-wafers.	Prototyping, low and medium volume production	6, 8	Pure-play	Netherlands
Rogue Valley Microdevices	MEMS Foundry and Silicon Wafers design/manufacturing for Microelectronics and Biomedical industries. Rogue Valley Microdevices MEMS Foundry Offers: Photo Mask Layout, Device fabrication on Sapphire, Quartz and Ceramic, MEMS fabrication on CMOS Wafers, Suspended membrane fabrication, Front to back alignment, I-Line stepper lithography, Photoresist spray coat, Precious metal deposition and patterning, Multi-layer metal films including Au/Sn solder, Reactively sputtered dielectric and resistive materials, LPCVD and PECVD Dielectric film deposition, KOH and TMAH Silicon Etch, Metal lift-off processing, Polyamide Processing	Silicon, Sapphire, Quartz, and Ceramic Polysilicon, Thermally Oxidized Silicon, Stoichiometric LPCVD Nitride, PECVD Oxide	Prototyping, Pilot, Low to Mid Volume Production	2, 4, 6, 8	Pure-Play	United States
Semefab	MEMS manufacturing		High volume production	4, 6	Pure-play	United Kingdom
Sensera	MEMS & microfabrication services		Prototyping, low, medium volume & bridge to high volume production	6 ; ancillary micro-fabrication services	Pure-play	United States
Silex Microsystems	MEMS process development and manufacturing	Silicon, SOI, Glass	Prototyping and high volume production	8	Pure-play	Sweden
SONY	MEMS development and manufacturing	Silicon, SOI	Prototyping and high volume production	6, 8	IDM	Japan
STMicroelectronics	MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones)	Silicon	High volume production		IDM	Switzerland
Teledyne DALSA	MEMS design and manufacturing with integration of individual foundry processes	Silicon and polysilicon	High volume production	6, 8	Pure-play	Canada
Teledyne Micralyne	MEMS design, manufacturing and packaging; microfabrication	Silicon, SOI and various glasses	From scale-up to high volume production	6	Pure-play	Canada
Texas Instruments	MEMS design and manufacturing	Silicon	High volume production		IDM	United States
Tower Jazz	IC manufacturing	Silicon	High volume production	6, 8	Pure-play	Israel
Tronics	MEMS design and manufacturing	Silicon, SOI and glass wafer	Prototyping, low and high volume production	6	Pure-play	France United States
TSMC	MEMS design and manufacturing	Silicon	High volume production	6, 8, 12	Pure-play	Taiwan
uFluidix	MEMS and Microfluidics manufacturing	Silicon, glass, PDMS	Low-Medium volume production		Pure-play	Canada
UMC	MEMS manufacturing	Silicon	High volume production	8	Pure-play	Taiwan
Xfab	MEMS design and manufacturing	Silicon and glass	High volume production	6, 8	Pure-play	Germany
MEMSCAP	MEMS manufacturing	Bulk Micromachining: Silicon, SOI Surface Micromachining: Polysilicon, Nitride, Oxide, PSG Thick Metal processing: Cu, Au, Ni and Pt	Prototyping, low, medium and high volume production	6	Pure-play	France

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