Octadecyltrichlorosilane

Octadecyltrichlorosilane (ODTS or n-octadecyltrichlorosilane) is an organosilicon chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH3(CH2)17SiCl3. It is flammable, reacts with water, and is also sensitive to air. It is corrosive and can severely damage mucous membranes. Its EINECS number is 203-930-7.

Octadecyltrichlorosilane
Names
IUPAC name
n-Octadecyltrichlorosilane
Other names
Trichlorooctadecylsilane
Stearyltrichlorosilane
Identifiers
3D model (JSmol)
Abbreviations ODTS
ChemSpider
ECHA InfoCard 100.003.573
EC Number
  • 203-930-7
UNII
Properties
C18H37Cl3Si
Molar mass 387.93 g·mol−1
Appearance Colorless liquid
Density 0.984 g/mL, liquid
Boiling point 223 °C (433 °F; 496 K) at 10 Torr
Solubility soluble in ether, THF, THP, hydrocarbons, tetrachloroethylene[1]
Hazards
Main hazards flammable, corrosive
Corrosive (C)
S-phrases (outdated) S26 S27 S36 S37 S39
NFPA 704 (fire diamond)
Flammability code 2: Must be moderately heated or exposed to relatively high ambient temperature before ignition can occur. Flash point between 38 and 93 °C (100 and 200 °F). E.g. diesel fuelHealth code 3: Short exposure could cause serious temporary or residual injury. E.g. chlorine gasReactivity code 2: Undergoes violent chemical change at elevated temperatures and pressures, reacts violently with water, or may form explosive mixtures with water. E.g. white phosphorusSpecial hazards (white): no code
2
3
2
Related compounds
Dodecyltrichlorosilane
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
N verify (what is YN ?)
Infobox references

Octadecyltrichlorosilane is an amphiphilic molecule consisting of a long-chain alkyl group (C18H37) and a polar head group (SiCl3), which forms self assembled monolayers (SAMs) on various oxidic substrates.[2]

ODTS finds its use in molecular electronics, as thin insulating gates in metal-insulator-semiconductor field-effect transistors.[3]

Dodecyltrichlorosilane, an ODTS analog with shorter alkyl chain, is used for the same purpose as well.

ODTS-PVP films are used in organic-substrate LCD displays.[4]

References

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